Polymer pen lithography
We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithogra...
Auteurs principaux: | , , , , , |
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Autres auteurs: | |
Format: | Journal Article |
Langue: | English |
Publié: |
2012
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Sujets: | |
Accès en ligne: | https://hdl.handle.net/10356/94822 http://hdl.handle.net/10220/8553 |