Polymer pen lithography

We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithogra...

Description complète

Détails bibliographiques
Auteurs principaux: Giam, Louise R., Mirkin, Chad A., Huo, Fengwei, Zheng, Zijian, Zheng, Gengfeng, Zhang, Hua
Autres auteurs: School of Materials Science & Engineering
Format: Journal Article
Langue:English
Publié: 2012
Sujets:
Accès en ligne:https://hdl.handle.net/10356/94822
http://hdl.handle.net/10220/8553