Polymer pen lithography
We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithogra...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/94822 http://hdl.handle.net/10220/8553 |
| _version_ | 1826115435404197888 |
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| author | Giam, Louise R. Mirkin, Chad A. Huo, Fengwei Zheng, Zijian Zheng, Gengfeng Zhang, Hua |
| author2 | School of Materials Science & Engineering |
| author_facet | School of Materials Science & Engineering Giam, Louise R. Mirkin, Chad A. Huo, Fengwei Zheng, Zijian Zheng, Gengfeng Zhang, Hua |
| author_sort | Giam, Louise R. |
| collection | NTU |
| description | We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development. |
| first_indexed | 2024-10-01T03:55:06Z |
| format | Journal Article |
| id | ntu-10356/94822 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:55:06Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | ntu-10356/948222023-07-14T15:46:31Z Polymer pen lithography Giam, Louise R. Mirkin, Chad A. Huo, Fengwei Zheng, Zijian Zheng, Gengfeng Zhang, Hua School of Materials Science & Engineering DRNTU::Engineering::Materials We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development. Accepted version 2012-09-14T08:26:15Z 2019-12-06T19:02:57Z 2012-09-14T08:26:15Z 2019-12-06T19:02:57Z 2008 2008 Journal Article Huo, F., Zheng, Z., Zheng, G., Giam, L. R., Zhang, H., & Mirkin, C. A. (2008). Polymer pen lithography. Science, 321(5896), 1658-1660. https://hdl.handle.net/10356/94822 http://hdl.handle.net/10220/8553 10.1126/science.1162193 en Science © 2008, AAAS This is the author created version of a work that has been peer reviewed and accepted for publication by Science, AAAS. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: DOI [10.1126/science.1162193]. application/pdf |
| spellingShingle | DRNTU::Engineering::Materials Giam, Louise R. Mirkin, Chad A. Huo, Fengwei Zheng, Zijian Zheng, Gengfeng Zhang, Hua Polymer pen lithography |
| title | Polymer pen lithography |
| title_full | Polymer pen lithography |
| title_fullStr | Polymer pen lithography |
| title_full_unstemmed | Polymer pen lithography |
| title_short | Polymer pen lithography |
| title_sort | polymer pen lithography |
| topic | DRNTU::Engineering::Materials |
| url | https://hdl.handle.net/10356/94822 http://hdl.handle.net/10220/8553 |
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