Preparation and characterization of ZnO microcantilever for nanoactuation

Preparation and characterization of ZnO microcantilever for nanoactuation

Zinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron micro...

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Bibliographic Details
Main Authors: Wang, Peihong, Du, Hejun, Shen, Shengnan, Zhang, Mingsheng, Liu, Bo
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Mechanical engineering::Assistive technology
Online Access:https://hdl.handle.net/10356/94920
http://hdl.handle.net/10220/9343

Internet

https://hdl.handle.net/10356/94920
http://hdl.handle.net/10220/9343

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