Laser induced Ni(Ti) silicide formation

Laser induced Ni(Ti) silicide formation

Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi2 grains formed at the interface. This supercell formation was caused b...

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Bibliografiska uppgifter
Huvudupphovsmän: Setiawan, Y., Lee, Pooi See, Pey, Kin Leong, Wang, X. C., Lim, G. C.
Övriga upphovsmän: School of Materials Science & Engineering
Materialtyp: Journal Article
Språk:English
Publicerad: 2012
Ämnen:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
Länkar:https://hdl.handle.net/10356/95000
http://hdl.handle.net/10220/8093

Internet

https://hdl.handle.net/10356/95000
http://hdl.handle.net/10220/8093

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