Laser-induced melt-mediated Ni(Pt) germanosilicide formation on condensed Si1-xGex/Si substrates
Laser-induced melt-mediated Ni-based germanosilicide has been formed on condensed SiGe substrates (with 40% Ge). Pure Ni germanosilicide formation was plagued by the presence of amorphous oxygen-rich globules. Platinum alloying has greatly improved the morphology of the...
| Главные авторы: | , , , , |
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| Другие авторы: | |
| Формат: | Journal Article |
| Язык: | English |
| Опубликовано: |
2012
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| Предметы: | |
| Online-ссылка: | https://hdl.handle.net/10356/95002 http://hdl.handle.net/10220/8005 |