A nano-opto-mechanical pressure sensor via ring resonator

A nano-opto-mechanical pressure sensor via ring resonator

This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which a...

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Bibliographic Details
Main Authors: Zhao, X., Tsai, J. M., Cai, H., Ji, X. M., Zhou, J., Bao, M. H., Huang, Y. P., Liu, Ai Qun., Kwong, Dim Lee.
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Online Access:https://hdl.handle.net/10356/95386
http://hdl.handle.net/10220/9323

Internet

https://hdl.handle.net/10356/95386
http://hdl.handle.net/10220/9323

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