Adaptive centroid-finding algorithm for freeform surface measurements
Wavefront sensing systems measure the slope or curvature of a surface by calculating the centroid displacement of two focal spot images. Accurately finding the centroid of each focal spot determines the measurement results. This paper studied several widely used centroid-finding techniques and obser...
Main Authors: | , , , , |
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Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2013
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Online Access: | https://hdl.handle.net/10356/96108 http://hdl.handle.net/10220/10100 |