Precisely rectilinear electro-thermal microactuator using a high-aspect ratio microstructured Si/SU-8 composite

Precisely rectilinear electro-thermal microactuator using a high-aspect ratio microstructured Si/SU-8 composite

This paper presents a Si/SU-8 composite electro-thermal microactuator that can generate a precisely rectilinear in-plane stroke. The microactuator consists of a pair of electro-thermally activated composite bimorphs which are joined at their tips through a central Si beam. When activated, the centra...

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Bibliographic Details
Main Authors: Thubthimthong, Borriboon, Lau, Gih Keong, Boon, Chong Nyok, Matham, Murukeshan Vadakke
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/96253
http://hdl.handle.net/10220/11488

Internet

https://hdl.handle.net/10356/96253
http://hdl.handle.net/10220/11488

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