Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral elec...
| Asıl Yazarlar: | , , , |
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| Diğer Yazarlar: | |
| Materyal Türü: | Journal Article |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
2013
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| Online Erişim: | https://hdl.handle.net/10356/97711 http://hdl.handle.net/10220/12044 |