Vertical coupling for silicon nitride waveguides using silicon grating couplers and transitions
Fiber to silicon nitride waveguides coupling is achieved using silicon grating coupler with a transition. Two optimized couplers are designed for TE and TM mode excitation, achieving over 55% efficiency. Fabrication issues are also discussed.
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/97823 http://hdl.handle.net/10220/12116 |