4H-SiC wafers studied by X-ray absorption and Raman scattering
Synchrotron radiation X-ray absorption and UV 325 nm excitation Raman scattering- photoluminescence (PL) have been employed to investigate a series of 4H-SiC wafers, including bulk, epitaxial single or multiple layer structures by chemical vapor deposition. Significant results on the atomic bonding...
Main Authors: | , , , , , , , , , , |
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Other Authors: | |
Format: | Conference Paper |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/97866 http://hdl.handle.net/10220/11147 |