Dual wavelength digital holography for improving the measurement accuracy
In dual wavelength digital holography, a synthetic wavelength is obtained by using two lasers with different wavelengths to expand the measurement range of samples’ step heights from nanometers to micrometers. However, its measurement accuracy reduces along with the expansion of measuring range and...
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2013
|
| Online Access: | https://hdl.handle.net/10356/98368 http://hdl.handle.net/10220/13364 |