Fabrication and plasma resistance properties of transparent YAG ceramics

High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...

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Bibliografiska uppgifter
Huvudupphovsmän: Qin, Xianpeng, Zhou, Guohong, Yang, Hao, Wong, Jen It, Zhang, Jian, Luo, Dewei, Wang, Shiwei, Ma, Jan, Tang, Dingyuan
Övriga upphovsmän: School of Electrical and Electronic Engineering
Materialtyp: Journal Article
Språk:English
Publicerad: 2013
Länkar:https://hdl.handle.net/10356/99521
http://hdl.handle.net/10220/12829