Fabrication and plasma resistance properties of transparent YAG ceramics

Fabrication and plasma resistance properties of transparent YAG ceramics

High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass...

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Bibliographic Details
Main Authors: Qin, Xianpeng, Zhou, Guohong, Yang, Hao, Wong, Jen It, Zhang, Jian, Luo, Dewei, Wang, Shiwei, Ma, Jan, Tang, Dingyuan
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/99521
http://hdl.handle.net/10220/12829

Internet

https://hdl.handle.net/10356/99521
http://hdl.handle.net/10220/12829

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