Physical spherical phase compensation in reflection digital holographic microscopy

Physical spherical phase compensation in reflection digital holographic microscopy

Reflection configured digital holographic microscopy (DHM) can perform accurate optical topography measurements of reflecting objects, such as MEMs, MOEMs, and semiconductor wafer. It can provide non-destructive quantitative measurements of surface roughness and geometric pattern characterization wi...

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Bibliographic Details
Main Authors: Qu, Weijuan, Chee, Oi Choo, Tan, Lewis Rongwei, Xu, Qiangsheng, Wang, Zhaomin, Xiao, Zhenzhong, Anand, Asundi
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Mechanical engineering
Online Access:https://hdl.handle.net/10356/99611
http://hdl.handle.net/10220/13639

Internet

https://hdl.handle.net/10356/99611
http://hdl.handle.net/10220/13639

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