Effects of Si(001) surface amorphization on ErSi2 thin film

Effects of Si(001) surface amorphization on ErSi2 thin film

In a materials study of ErSi2/Si(001) as a potential candidate for Schottky source/drain NMOS application, the properties of ErSi2 thin film were investigated with varying degrees of Si(001) surface amorphization. The amorphization was carried out by in situ Ar plasma cleaning and Si pre-amorphizati...

Full description

Bibliographic Details
Main Authors: Pey, Kin Leong, Lee, Pooi See, Tan, Eu Jin, Kon, M. L., Zhang, Y. W., Wang, W. D., Chi, Dong Zhi
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/99843
http://hdl.handle.net/10220/10497

Internet

https://hdl.handle.net/10356/99843
http://hdl.handle.net/10220/10497

Similar Items