�THE EFFECT OF DC-SPUTTERING PARAMETERS AND Al DOPING ON CONDUCTIVITY AND TRANSPARENCY OF TiO2 THIN FILMS�
Titanium dioxide (TiO2) thin films have been deposited on glass substrates under various conditions by using a homemade DC reactive sputtering technique. The TiO2 thin film has unique characteristics and economical alternative material for transparent conductivity oxide thin films compared with othe...
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| Format: | Thesis |
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[Yogyakarta] : Universitas Gadjah Mada
2013
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