Pembuatan lapisan tipis ZnO : Al pada substrat kaca dengan metode DC Sputtering dan Karakterisasi sifat fisisnya=Preparation of ZnO : Al Thin films on the glass substrate by DC Sputtering method and ...
The preparation of ZnO:Al thin films on the glass substrate by DC sputtering method and characterization of their physical properties have been done. The crystalline structure of the films were characterized using XRD. The XRD's result showed that the ZnO:Al thin films deposited on the glass su...
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[Yogyakarta] : Universitas Gadjah Mada
2004
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