Micro-hotplate based temperature stabilization system for CMOS SAW resonators
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon h...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin / Heidelberg
2009
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/1939/2/Microsystems2009.pdf |