Micro-hotplate based temperature stabilization system for CMOS SAW resonators
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon h...
| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | English |
| Publicado em: |
Springer Berlin / Heidelberg
2009
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| Assuntos: | |
| Acesso em linha: | http://irep.iium.edu.my/1939/2/Microsystems2009.pdf |
| _version_ | 1825644257470316544 |
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| author | Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. |
| author_facet | Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. |
| author_sort | Nordin, Anis Nurashikin |
| collection | IIUM |
| description | Due to the sensitivity of the piezoelectric layer
in surface acoustic wave (SAW) resonators to temperature,
a method of achieving device stability as a function of
temperature is required. This work presents two methods of
temperature control for CMOS SAW resonators using
embedded polysilicon heaters. The first approach employs
the oven control temperature stabilization scheme. Using
this approach, the device’s temperature is elevated using
on-chip heaters to Tmax = 42°C to maintain constant
device temperature. Both DC and RF measurements of the
heater together with the resonator were conducted.
Experimental results have indicated that the TCF of the
CMOS SAW resonator of -97.2 ppm/°C has been reduced
to -23.19 ppm/°C when heated to 42°C. The second
scheme uses a feedback control circuit to switch the onchip
heaters on and off depending on the ambient temperature.
This method provided reduction of the TCF from
-165.38 ppm/°C, to -93.33 ppm/°C. Comparison of both
methods was also provided. |
| first_indexed | 2024-03-05T22:30:14Z |
| format | Article |
| id | oai:generic.eprints.org:1939 |
| institution | International Islamic University Malaysia |
| language | English |
| last_indexed | 2024-03-05T22:30:14Z |
| publishDate | 2009 |
| publisher | Springer Berlin / Heidelberg |
| record_format | dspace |
| spelling | oai:generic.eprints.org:19392011-09-13T03:43:56Z http://irep.iium.edu.my/1939/ Micro-hotplate based temperature stabilization system for CMOS SAW resonators Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. TK7885 Computer engineering Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon heaters. The first approach employs the oven control temperature stabilization scheme. Using this approach, the device’s temperature is elevated using on-chip heaters to Tmax = 42°C to maintain constant device temperature. Both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/°C has been reduced to -23.19 ppm/°C when heated to 42°C. The second scheme uses a feedback control circuit to switch the onchip heaters on and off depending on the ambient temperature. This method provided reduction of the TCF from -165.38 ppm/°C, to -93.33 ppm/°C. Comparison of both methods was also provided. Springer Berlin / Heidelberg 2009 Article PeerReviewed application/pdf en http://irep.iium.edu.my/1939/2/Microsystems2009.pdf Nordin, Anis Nurashikin and Voiculescu, Ioana and Zaghloul, Mona E. (2009) Micro-hotplate based temperature stabilization system for CMOS SAW resonators. Microsystems Technologies, 15 (8). pp. 1187-1193. ISSN 0946-7076 (Print), 1432-1858 (Online) http://www.springerlink.com/content/cv523534175363p2/about/ 10.1007/s00542-009-07865 |
| spellingShingle | TK7885 Computer engineering Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. Micro-hotplate based temperature stabilization system for CMOS SAW resonators |
| title | Micro-hotplate based temperature stabilization system for CMOS SAW resonators |
| title_full | Micro-hotplate based temperature stabilization system for CMOS SAW resonators |
| title_fullStr | Micro-hotplate based temperature stabilization system for CMOS SAW resonators |
| title_full_unstemmed | Micro-hotplate based temperature stabilization system for CMOS SAW resonators |
| title_short | Micro-hotplate based temperature stabilization system for CMOS SAW resonators |
| title_sort | micro hotplate based temperature stabilization system for cmos saw resonators |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/1939/2/Microsystems2009.pdf |
| work_keys_str_mv | AT nordinanisnurashikin microhotplatebasedtemperaturestabilizationsystemforcmossawresonators AT voiculescuioana microhotplatebasedtemperaturestabilizationsystemforcmossawresonators AT zaghloulmonae microhotplatebasedtemperaturestabilizationsystemforcmossawresonators |