Mathematical modeling of sputtering-induced surface roughness
This paper develops a sputtering-induced surface roughness model. The model is necessary to control surface roughness of a replicating tool that is machined by focused ion beam (FIB). The significant Gaussian intensity level of FIB profile is determined first, the mathematical model of surface rough...
| Main Authors: | , , |
|---|---|
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2001
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27142/1/034_DTIP-SPIE_France_2001_510-521_Ali.pdf |