Microstructure and electrical properties of AZO films prepared by RF magnetron sputtering

AZO is an ideal replacement transparent conducting oxide (TCO) for ITO to all corresponding applications. The typical applications include: transparent electrodes for solar cells, flat panel displays, LCD electrodes, electro-magnetic compatibility (RF-EMI shielding) coatings, touch panel transparent...

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Bibliographic Details
Main Authors: Bakri, Jufriadi, Sutjipto, Agus Geter Edy, Othman, Raihan, Muhida, Riza
Format: Article
Language:English
Published: Trans Tech Publications, Switzerland 2011
Subjects:
Online Access:http://irep.iium.edu.my/2876/1/AMR_264-265_2011_Jufri.pdf