A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf |