Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The...
| Những tác giả chính: | , , , |
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| Định dạng: | Proceeding Paper |
| Ngôn ngữ: | English |
| Được phát hành: |
2013
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| Những chủ đề: | |
| Truy cập trực tuyến: | http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf |