The physics of sputtering
Early sputtering observations were made in the abnormal glow discharge at pressures around 1 mm Hg and indicated that the mass sputtered per unit charge passed through the discharge tube varied linearly with the cathode fall of potential.
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| Format: | Thesis |
| Language: | English |
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1962
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| Online Access: | https://repository.londonmet.ac.uk/7031/1/Stocker-BJ_1962_The-Physics-of-Sputtering.pdf |