Thin films of tetragonal zirconia with Bi doping: deposition, characterisation and thermal behaviour
Undoped and Bi-doped zirconia films have been grown by MOCVD on both Si(100) single crystals, and fused SiO2 substrates. Zr(C5H7O2)4 and Bi(C6H5)3 precursors have been used as metal sources. A tetragonal zirconia phase forms on both substrates. Firing of undoped ZrO2 thin films causes a tetragonal t...
| Main Authors: | , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
1999
|