Optimising control of microwave plasma bias enhanced nucleation for heteroepitaxial chemical vapour deposition diamond

Optimising control of microwave plasma bias enhanced nucleation for heteroepitaxial chemical vapour deposition diamond

Bias enhanced nucleation (BEN) during microwave plasma enhanced chemical vapour deposition of diamond on Si(100) has been studied using atomic force microscopy (AFM), scanning electron microscopy, Raman scattering and optical reflectivity measurements. The critical nature of the BEN treatment period...

Deskribapen osoa

Xehetasun bibliografikoak
Egile Nagusiak:	Marshall, R, Whitfield, MD, Tracey, S, Thompson, D, Foord, J, Jackman, R
Formatua:	Conference item
Argitaratua:	1997

Antzeko izenburuak

Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
nork: Whitfield, MD, et al.
Argitaratua: (1996)

Biased enhanced nucleation of diamond on metals: An OES and electrical investigation
nork: Whitfield, MD, et al.
Argitaratua: (1997)

Reactions of xenon difluoride and atomic hydrogen at chemical vapour deposited diamond surfaces
nork: Foord, J, et al.
Argitaratua: (2001)

Heteroepitaxial diamond growth on 4H-SiC using microwave plasma chemical vapor deposition
nork: Eric Moore, et al.
Argitaratua: (2017-09-01)

THE GROWTH OF NUCLEATION LAYERS FOR HIGH-QUALITY DIAMOND CVD FROM AN RF PLASMA
nork: Jackman, R, et al.
Argitaratua: (1995)

Hot filament chemical vapour deposition of diamond ultramicroelectrodes.
nork: Hu, J, et al.
Argitaratua: (2007)

Spatially resolved optical emission spectroscopy of the secondary glow observed during biasing of a microwave plasma
nork: Whitfield, MD, et al.
Argitaratua: (2000)

Diamond film growth by microwave plasma enhanced chemical vapour deposition
nork: Tan, Fong Hock.
Argitaratua: (2009)

Characterisation of the secondary glow region of a biased microwave plasma by optical emission spectroscopy
nork: Whitfield, MD, et al.
Argitaratua: (2000)

DIAMOND CHEMICAL-VAPOR-DEPOSITION FROM A CAPACITIVELY COUPLED RADIO-FREQUENCY PLASMA
nork: Jackman, R, et al.
Argitaratua: (1995)

Pseudovertical Schottky Diodes on Heteroepitaxially Grown Diamond
nork: Jürgen Weippert, et al.
Argitaratua: (2022-11-01)

Heteroepitaxy of diamond semiconductor on iridium: a review
nork: Weihua Wang, et al.
Argitaratua: (2022-12-01)

Electrochemical interactions of group IB metals at chemical vapour deposited boron-doped diamond surfaces
nork: Foord, J, et al.
Argitaratua: (2001)

CHEMICAL-VAPOR-DEPOSITION OF DIAMOND FROM A NOVEL CAPACITIVELY COUPLED RF PLASMA SOURCE
nork: Jackman, R, et al.
Argitaratua: (1995)

Synthesis of boron doped continuous diamond film by microwave assisted plasma enhanced chemical vapour deposition
nork: Wang, Shancheng
Argitaratua: (2016)

The effect of hydrogen on the electronic properties of CVD diamond films
nork: Looi, H, et al.
Argitaratua: (1999)

Growth of nanocrystalline diamond films for low field electron emission
nork: Proffitt, S, et al.
Argitaratua: (1999)

Field emission from thin film diamond grown using a magnetically enhanced radio frequency plasma source
nork: Proffitt, S, et al.
Argitaratua: (1999)

Deposition and Characterization of Polycrystalline Diamond Coated on Silicon Nitride and Tungsten Carbide Using Microwave Plasma Assisted Chemical Vapour Deposition Technique /
nork: Esah Hamzah, author 179197, et al.
Argitaratua: (2008)

Deposition and characterization of polycrystalline diamond coated on silicon nitride and tungsten carbide using microwave plasma assisted chemical vapour deposition technique
nork: Agung Purniawan, Agung Purniawan
Argitaratua: (2008)

Deposition and characterization of polycrystalline diamond coated on silicon nitride and tungsten carbide using microwave plasma assisted chemical vapour deposition technique /
nork: 452342 Agung Purniawan, et al.
Argitaratua: (2008)

Chemical vapour deposition of diamond for dental tools and burs /
nork: Ahmed, Waqar, author, et al.
Argitaratua: (2014)

Deep level transient spectroscopy of CVD diamond: the observation of defect states in hydrogenated films
nork: Gaudin, O, et al.
Argitaratua: (2001)

Progress towards high power thin film diamond transistors
nork: Looi, H, et al.
Argitaratua: (1999)

Formation of diamond and nanocrystalline diamond films by microwave plasma CVD
nork: Hiramatsu, M, et al.
Argitaratua: (2002)

Influence of the environment on the surface conductivity of chemical vapor deposition diamond
nork: Foord, J, et al.
Argitaratua: (2002)

Hydrogen doped thin film diamond phototransistor/photodiode structures for the detection of UV radiation
nork: Whitfield, MD, et al.
Argitaratua: (2000)

Engineering low resistance contacts on p-type hydrogenated diamond surfaces
nork: Looi, H, et al.
Argitaratua: (2000)

High-performance devices from surface-conducting thin-film diamond
nork: Jackman, R, et al.
Argitaratua: (1999)

Microwave plasma-enhanced chemical vapour deposition growth of carbon nanostructures
nork: Shivan R. Singh, et al.
Argitaratua: (2010-03-01)

Deposition and characterization of polycrystalline diamond coated on silicon nitride and tungsten carbide using microwave plasma assisted chemical vapour deposition technique [electronic resource] /
nork: 452342 Agung Purniawan, et al.
Argitaratua: (2008)

Effects of Surface Modification of Nanodiamond Particles for Nucleation Enhancement during Its Film Growth by Microwave Plasma Jet Chemical Vapour Deposition Technique
nork: Chii-Ruey Lin, et al.
Argitaratua: (2014-01-01)

Theoretical Evaluation of Possibility to Control Nucleation and Growth of Heteroepitaxial Carbon Films by Applied Fields
nork: B. Z. Mansurov, et al.
Argitaratua: (2001-12-01)

Determination of optical properties of single crystal diamond substrates grown via welding-assisted microwave plasma enhanced chemical vapour deposition
nork: Khyati Upadhyay, et al.
Argitaratua: (2024-12-01)

INTERACTION OF HYDROGEN WITH CHEMICAL-VAPOR-DEPOSITION DIAMOND SURFACES - A THERMAL-DESORPTION STUDY
nork: Chua, L, et al.
Argitaratua: (1994)

Formation of shallow acceptor states in the surface region of thin film diamond
nork: Williams, O, et al.
Argitaratua: (2001)

Diamond chemical vapor deposition : nucleation and early growth stages /
nork: Liu, Huimin, 1961-, et al.
Argitaratua: (1995)

Microwave plasma-enhanced chemical vapour deposition growth of carbon nanostructures
nork: Shivan Singh, et al.
Argitaratua: (2010-03-01)

Microwave plasma-enhanced chemical vapour deposition growth of carbon nanostructures
nork: Shivan Singh, et al.
Argitaratua: (2010-03-01)

Microwave plasma-enhanced chemical vapour deposition growth of carbon nanostructures
nork: Shivan Singh, et al.
Argitaratua: (2010-03-01)