Transmission ion channeling analysis of isolated 60 degrees misfit dislocations
High-contrast transmission channeling images and linescans of isolated bunches and individual 60° misfit dislocations in thick partially relaxed Si1-x Gex Si layers are presented. Changes in dislocation contrast with tilt angle are explained using a model of planar dechanneling by the two-edge compo...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2005
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