Pull-in dynamics of overdamped microbeams
We study the dynamics of MEMS microbeams undergoing electrostatic pull-in. At DC voltages close to the pull-in voltage, experiments and numerical simulations have reported `bottleneck' behaviour in which the transient dynamics slow down considerably. This slowing down is highly sensitive to ext...
| Main Authors: | , , |
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| Format: | Journal article |
| Published: |
IOP Publishing
2018
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