Surface-acoustic-wave transducers for the extremely-high-frequency range using AlN/SiC(0001)
The fast sound propagation in AlN layers is demonstrated to enable generation of surface acoustic waves (SAWs) by interdigital transducers at a frequency beyond 30 GHz. While scaling down the wavelength of the transducers fabricated on AlN/SiC structures and the thickness of the AlN top layer to rai...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2004
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