Three-dimensional optical lithography for photonic microstructures
A rapid and flexible technique for optical fabrication by creating a device embedded in, and in registration with, a 3D photonic crystal using holographic lithography to define the underlying periodic microstructure was demonstrated. The new optical lithography techniques are intrinsically well adap...
| Main Authors: | , , , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
2006
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