Three-dimensional optical lithography for photonic microstructures
A rapid and flexible technique for optical fabrication by creating a device embedded in, and in registration with, a 3D photonic crystal using holographic lithography to define the underlying periodic microstructure was demonstrated. The new optical lithography techniques are intrinsically well adap...
| Príomhchruthaitheoirí: | , , , , , |
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| Formáid: | Journal article |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
2006
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| _version_ | 1826257895628472320 |
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| author | Scrimgeour, J Sharp, D Blanford, C Roche, O Denning, R Turberfield, A |
| author_facet | Scrimgeour, J Sharp, D Blanford, C Roche, O Denning, R Turberfield, A |
| author_sort | Scrimgeour, J |
| collection | OXFORD |
| description | A rapid and flexible technique for optical fabrication by creating a device embedded in, and in registration with, a 3D photonic crystal using holographic lithography to define the underlying periodic microstructure was demonstrated. The new optical lithography techniques are intrinsically well adapted to 3D photonic-crystal device fabrication and uses a 3D interface pattern created at the intersection of four laser beams. It has been shown that by imaging the distribution of photo-chemical change induced by a holographic exposure,it is possible to align subsequent two-photon exposures to create device structures embedded in a 3D photonic-crystal lattice. This process has sufficient resolution to create embedded waveguide and microcavity structures by selectively modifying individual unit cells in the bulk of a 3D photonic crystals. The results show that holographic lithography can be combined with direct two-photon laser writing to photonic crystals with 3D structural modifications. |
| first_indexed | 2024-03-06T18:25:25Z |
| format | Journal article |
| id | oxford-uuid:07c7b5d1-9fec-4b9a-a7ce-62594b528b00 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T18:25:25Z |
| publishDate | 2006 |
| record_format | dspace |
| spelling | oxford-uuid:07c7b5d1-9fec-4b9a-a7ce-62594b528b002022-03-26T09:09:23ZThree-dimensional optical lithography for photonic microstructuresJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:07c7b5d1-9fec-4b9a-a7ce-62594b528b00EnglishSymplectic Elements at Oxford2006Scrimgeour, JSharp, DBlanford, CRoche, ODenning, RTurberfield, AA rapid and flexible technique for optical fabrication by creating a device embedded in, and in registration with, a 3D photonic crystal using holographic lithography to define the underlying periodic microstructure was demonstrated. The new optical lithography techniques are intrinsically well adapted to 3D photonic-crystal device fabrication and uses a 3D interface pattern created at the intersection of four laser beams. It has been shown that by imaging the distribution of photo-chemical change induced by a holographic exposure,it is possible to align subsequent two-photon exposures to create device structures embedded in a 3D photonic-crystal lattice. This process has sufficient resolution to create embedded waveguide and microcavity structures by selectively modifying individual unit cells in the bulk of a 3D photonic crystals. The results show that holographic lithography can be combined with direct two-photon laser writing to photonic crystals with 3D structural modifications. |
| spellingShingle | Scrimgeour, J Sharp, D Blanford, C Roche, O Denning, R Turberfield, A Three-dimensional optical lithography for photonic microstructures |
| title | Three-dimensional optical lithography for photonic microstructures |
| title_full | Three-dimensional optical lithography for photonic microstructures |
| title_fullStr | Three-dimensional optical lithography for photonic microstructures |
| title_full_unstemmed | Three-dimensional optical lithography for photonic microstructures |
| title_short | Three-dimensional optical lithography for photonic microstructures |
| title_sort | three dimensional optical lithography for photonic microstructures |
| work_keys_str_mv | AT scrimgeourj threedimensionalopticallithographyforphotonicmicrostructures AT sharpd threedimensionalopticallithographyforphotonicmicrostructures AT blanfordc threedimensionalopticallithographyforphotonicmicrostructures AT rocheo threedimensionalopticallithographyforphotonicmicrostructures AT denningr threedimensionalopticallithographyforphotonicmicrostructures AT turberfielda threedimensionalopticallithographyforphotonicmicrostructures |