Shielded hydrogen passivation – a novel method for introducing hydrogen into silicon

This paper reports a new approach for exposing materials, including solar cell structures, to atomic hydrogen. This method is dubbed Shielded Hydrogen Passivation (SHP) and has a number of unique features offering high levels of atomic hydrogen at low temperature whilst inducing no damage. SHP uses...

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Detalles Bibliográficos
Autores principales: Bourret-Sicotte, G, Hamer, P, Bonilla, R, Collett, K, Wilshaw, P
Formato: Conference item
Publicado: Elsevier 2017