Shielded hydrogen passivation – a novel method for introducing hydrogen into silicon
This paper reports a new approach for exposing materials, including solar cell structures, to atomic hydrogen. This method is dubbed Shielded Hydrogen Passivation (SHP) and has a number of unique features offering high levels of atomic hydrogen at low temperature whilst inducing no damage. SHP uses...
| Main Authors: | , , , , |
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| Format: | Conference item |
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Elsevier
2017
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