A simple technique to determine the anisotropy of Young's modulus of single crystal silicon using coupled micro-cantilevers
This paper reports on a simple technique to measure the anisotropy of the Young's modulus of single crystal silicon using a coupled cantilever structure fabricated in the silicon. We demonstrate that it is possible to determine the Young's modulus of five silicon micro-cantilevers, whose o...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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