Experimental Setup for Energy-Filtered Scanning Confocal Electron Microscopy (EFSCEM) in a Double Aberration-Corrected Transmission Electron Microscope
Scanning confocal electron microscopy (SCEM) is a new imaging mode in electron microscopy. Spherical aberration corrected electron microscope instruments fitted with two aberration correctors can be used in this mode which provides improved depth resolution and selectivity compared to optical sectio...
| Main Authors: | , , , |
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| Format: | Conference item |
| Published: |
2010
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