Coherent X-ray measurements of ion-implantation-induced lattice strains in nano-crystals
Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga+), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter on the nano-scale has revolutionised sample preparation acr...
Main Authors: | , , , , , , , , |
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Format: | Working paper |
Language: | English |
Published: |
arXiv
2016
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