Adaptive optics for direct laser writing with plasma emission aberration sensing.

Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. Closed loop adaptive optics can correct these aberrations if a suitable feedback signal can be found. Focusing an ultrafast laser beam into transparent dielectric material...

Повний опис

Бібліографічні деталі
Автори: Jesacher, A, Marshall, G, Wilson, T, Booth, M
Формат: Journal article
Мова:English
Опубліковано: 2010