Adaptive optics for direct laser writing with plasma emission aberration sensing.
Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. Closed loop adaptive optics can correct these aberrations if a suitable feedback signal can be found. Focusing an ultrafast laser beam into transparent dielectric material...
Автори: | , , , |
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Формат: | Journal article |
Мова: | English |
Опубліковано: |
2010
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