PULSED LASER ATOM PROBE ANALYSIS OF GAAS AND INAS
A pulsed laser atom probe has been used to obtain the first stoichiometrically correct analysis of GaAs and InAs. These results are presented, together with a comparison of results obtained from conventional and pulsed laser atom probes.
Main Authors: | , , |
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Format: | Journal article |
Language: | English |
Published: |
1985
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