COMPARATIVE-STUDIES OF THE THERMAL-DECOMPOSITION OF TRITERTIARYBUTYLGALLIUM AND TRI-ISOBUTYLGALLIUM ON GAAS(100)
The adsorption of tritertiarybutylgallium (TTBG) and tri-isobutylgallium (TIBG) on GaAs(100), and on In and Al doped GaAs(100) surfaces, has been investigated using AES, HREELS and thermal desorption techniques. Both TTBG and TIBG adsorb with high sticking probability on the GaAs surface at 300 K to...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1992
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