Nanotribology of clean and oxide-covered silicon surfaces using atomic force microscopy
Atomic force microscopy (AFM) has been used for tribological studies of silicon surfaces both with and without an oxide layer on the surface. Three different types of surfaces were prepared: a silicon surface with a chemical oxide made by the SC1 process, a silicon surface with a thermal oxide, and...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
JJAP
2000
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