InGaN super-lattice growth for fabrication of quantum dot containing microdisks
Microstructural characterisation of a heterostructure containing an In xGa1-xN/InyGa1-yN super-lattice sacrificial layer (SSL), an AlGaN etch stop layer and an InGaN quantum dot layer has been carried out. These structures are intended for photo-electrochemical etch mediated fabrication of undercut...
Main Authors: | El-Ella, H, Rol, F, Collins, D, Kappers, M, Taylor, R, Hu, E, Oliver, R |
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Format: | Journal article |
Language: | English |
Published: |
2011
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