Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging
| Autors principals: | , , , , |
|---|---|
| Format: | Journal article |
| Publicat: |
1999
|
| _version_ | 1826264090334461952 |
|---|---|
| author | Castell, M Simpson, T Mitchell, I Perovic, D Baribeau, J |
| author_facet | Castell, M Simpson, T Mitchell, I Perovic, D Baribeau, J |
| author_sort | Castell, M |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-06T20:02:11Z |
| format | Journal article |
| id | oxford-uuid:27af54b7-26a0-4cf1-8fe0-5ca92bca5ecb |
| institution | University of Oxford |
| last_indexed | 2024-03-06T20:02:11Z |
| publishDate | 1999 |
| record_format | dspace |
| spelling | oxford-uuid:27af54b7-26a0-4cf1-8fe0-5ca92bca5ecb2022-03-26T12:08:22ZDeactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imagingJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:27af54b7-26a0-4cf1-8fe0-5ca92bca5ecbSymplectic Elements at Oxford1999Castell, MSimpson, TMitchell, IPerovic, DBaribeau, J |
| spellingShingle | Castell, M Simpson, T Mitchell, I Perovic, D Baribeau, J Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging |
| title | Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging |
| title_full | Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging |
| title_fullStr | Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging |
| title_full_unstemmed | Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging |
| title_short | Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging |
| title_sort | deactivation and diffusion of boron in ion implanted silicon studied by secondary electron imaging |
| work_keys_str_mv | AT castellm deactivationanddiffusionofboroninionimplantedsiliconstudiedbysecondaryelectronimaging AT simpsont deactivationanddiffusionofboroninionimplantedsiliconstudiedbysecondaryelectronimaging AT mitchelli deactivationanddiffusionofboroninionimplantedsiliconstudiedbysecondaryelectronimaging AT perovicd deactivationanddiffusionofboroninionimplantedsiliconstudiedbysecondaryelectronimaging AT baribeauj deactivationanddiffusionofboroninionimplantedsiliconstudiedbysecondaryelectronimaging |