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Deactivation and diffusion of...
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Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging
Show other versions (1)
Bibliographic Details
Main Authors:
Castell, M
,
Simpson, T
,
Mitchell, I
,
Perovic, D
,
Baribeau, J
Format:
Journal article
Published:
1999
Holdings
Description
Other Versions (1)
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