Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging

Antzeko izenburuak

• Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging
  nork: Castell, M, et al.
  Argitaratua: (1999)
• Deactivation and diffusion of boron in ion-implanted silicon: dopant mapping through secondary electron imaging
  nork: Castell, M, et al.
  Argitaratua: (1999)
• Kinetics of the permanent deactivation of the boron-oxygen complex in crystalline silicon as a function of illumination intensity
  nork: Verena Steckenreiter, et al.
  Argitaratua: (2017-03-01)
• Plasma immersion ion implantation of boron for ribbon silicon solar cells
  nork: Derbouz K., et al.
  Argitaratua: (2013-09-01)
• The Modeling of the Radiation Enhanced Diffusion of Boron in Silicon
  nork: Gadiyak, G.V., et al.
  Argitaratua: (1994-06-01)