Stress evaluation in thin films: Micro-focus synchrotron X-ray diffraction combined with focused ion beam patterning for d(o) evaluation
Nanocrystalline metallic coatings of sub-micron thickness are widely used in modern microelectronic applications. In X-ray diffraction experiments to determine both the residual and applied stresses in nanocrystalline coatings, one difficult challenge that comes up invariably is the determination of...
| Hauptverfasser: | , , , , , |
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| Format: | Journal article |
| Veröffentlicht: |
2013
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