Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
A negative bias applied to a nondiamond substrate at the initiation of microwave plasma-enhanced chemical-vapor deposition of thin-film diamond can lead to diamond nucleation, high crystalline density, and an improved level of crystallographic alignment. In this work, optical emission spectroscopy h...
| Hauptverfasser: | , , , , |
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| Format: | Journal article |
| Sprache: | English |
| Veröffentlicht: |
1996
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