Microwave plasma characteristics during bias-enhanced nucleation of diamond: An optical emission spectroscopic study
A negative bias applied to a nondiamond substrate at the initiation of microwave plasma-enhanced chemical-vapor deposition of thin-film diamond can lead to diamond nucleation, high crystalline density, and an improved level of crystallographic alignment. In this work, optical emission spectroscopy h...
| Autores principales: | , , , , |
|---|---|
| Formato: | Journal article |
| Lenguaje: | English |
| Publicado: |
1996
|