Determination of the anisotropy of young's modulus using a coupled microcantilever array
This paper reports a simple technique to measure the anisotropy of the Young's modulus of MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal silicon with an array of cantilevers fabricated in (100) silicon following a wagon wheel configuration. The long ax...
| Những tác giả chính: | , , , |
|---|---|
| Định dạng: | Journal article |
| Ngôn ngữ: | English |
| Được phát hành: |
2012
|