Equilibrium shape of CoSi2 hut clusters on Si(100)
CoSi2 clusters of constant height on a Si(100) surface grow in a square shape at first, but at a critical size a shape transition to clusters with large aspect ratios occurs. With each cluster connected to an implanted layer of cobalt by a thermally induced defect that serves as a diffusion channel,...
| Main Authors: | , , , |
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| Format: | Conference item |
| Published: |
1998
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