The influence of surface electric fields on the chemical passivation of Si-SiO2 interfaces after firing
In this work it is demonstrated that the presence of surface electric fields during a post-deposition anneal can impact the chemical passivation of SiO2 + SiNx double layer stacks. Although the surface passivation generated in such dielectrics is well known, we demonstrate that an electric field pre...
| Main Authors: | , , , , , |
|---|---|
| Format: | Conference item |
| Language: | English |
| Published: |
AIP Publishing
2022
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