The influence of surface electric fields on the chemical passivation of Si-SiO2 interfaces after firing

The influence of surface electric fields on the chemical passivation of Si-SiO2 interfaces after firing

In this work it is demonstrated that the presence of surface electric fields during a post-deposition anneal can impact the chemical passivation of SiO2 + SiNx double layer stacks. Although the surface passivation generated in such dielectrics is well known, we demonstrate that an electric field pre...

书目详细资料
Main Authors:	Al-Dhahir, I, McNab, S, Yu, M, Shaw, E, Hamer, P, Bonilla Osorio, RS
格式:	Conference item
语言:	English
出版:	AIP Publishing 2022

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